Ceramic Forum, Glass Manufacturing Technology and Wide-Gap Semiconductors

From formula (A-2), the trap concentration is obtained as follows.

Also, approximate concentration without considering λ region is obtained from formula (A-5).

As described above, the deep level parameters (energy level, capture cross-section) and concentration can be measured by the DLTS method.
However, with this method, it is accompanied by temperature increases / decreases to obtain multiple Arrhenius plot points, which takes a great deal of effort to repeat the measurements in differing rate windows.

• DLTS Method
• Phystech DLTS Measuring Device (FT1030)
• HERA-DLTS System Specifications
• Evaluation and Analysis Services
• Detailed explanation of DLTS method
  • Capacitance Transient Measurement
  • DLTS Spectrum
  • Trap Parameter (level energy and capture cross-section) Evaluation
  • Trap Concentration
  • Pulse-filling Method (capture cross-section measurement)
  • Improved DLTS Method