SiC semi-insulating wafers have wide application for use as a base substrate in high frequency devices (Gallium nitride HEMT).Already in wide use as a transmission amplifier in cellular phone base stations, military radar etc., usage has been steadily increasing over the last few years.In the future, it shows promise for application in automotive radar, large-capacity data transmission etc.
Ceramic Forum began handling SiC semi-insulating wafers manufactured by Norstel AB in 2011.Norstel AB semi-insulating SiC wafers are manufactured by high temperature CVD method, which has the following characteristics in comparison with wafers produced by the sublimation method.
・Low rate of defects (low MPD, TSD) -High-resistivity high resistance uniformity in the wafer plane
A spin-off venture from Sweden's Linkoping University, with a history of high achievement in SiC research. Currently, the largest Epi service provider in Europe.Started in 1993, based on joint SiC research from Sweden's Linkoping University and ABB Ltd., Norstel AB continued under the umbrella of Finland's Si wafer maker, Okmetic, until independence in 2005.In addition to the SiC epi furnaces for mass production and the single wafer epi furnace for R&D, Norstel AB has built a system for mass production supported by a great deal of evaluation equipment.